Ferroelectric memory devices using hafnium aluminum oxides and remote plasma-treated electrodes for sustainable energy-efficient electronics
- Cun Bo Liu
- , Ruo Yin Liao
- , Hsuan Han Chen
- , Zhi Wei Zheng
- , Kuan Hung Su
- , I. Cheng Lin
- , Ting An Liang
- , Ping Yu Lin
- , Chen Hao Wen
- , Hsiao Hsuan Hsu
- , Chun Hu Cheng*
- , Ching Chien Huang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review