Ferroelectric memory devices using hafnium aluminum oxides and remote plasma-treated electrodes for sustainable energy-efficient electronics

Cun Bo Liu, Ruo Yin Liao, Hsuan Han Chen, Zhi Wei Zheng, Kuan Hung Su, I. Cheng Lin, Ting An Liang, Ping Yu Lin, Chen Hao Wen, Hsiao Hsuan Hsu, Chun Hu Cheng*, Ching Chien Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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