Ferroelectric HfZrO2 FETs for steep switch onset

K. T. Chen, C. Y. Liao, H. Y. Chen, C. Lo, G. Y. Siang, Y. Y. Lin, Y. J. Tseng, C. Chang, C. Y. Chueh, Y. J. Yang, M. H. Liao, K. S. Li, S. T. Chang, M. H. Lee

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Abstract

The ferroelectric HfZrO2 (HZO) is focused on coercive voltage for onset of negative capacitance (NC) with sub-2.3kbT/q subthreshold swing (SS). The Fe-FETs with ultra-thin HZO (<10 nm) is experimentally obtained gradual transition on SS and VT shift on annealing temperatures and sweep ranges. The polarization hysteresis of metal/ferroelectric/metal (MFM) is employed to match FET load line and balances the charge from positive capacitance (PC) to NC with increasing applied bias. The adjustment for charge of FET load line to reduce NC onset voltage is discussed. The feasible concept of coupling the ferroelectric Hf-based oxide is practicable to following current CMOS architectures.

Original languageEnglish
Article number110991
JournalMicroelectronic Engineering
Volume215
DOIs
Publication statusPublished - 2019 Jul 15

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Keywords

  • Fe-FETs
  • HZO
  • Negative capacitance
  • Onset voltage

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Chen, K. T., Liao, C. Y., Chen, H. Y., Lo, C., Siang, G. Y., Lin, Y. Y., Tseng, Y. J., Chang, C., Chueh, C. Y., Yang, Y. J., Liao, M. H., Li, K. S., Chang, S. T., & Lee, M. H. (2019). Ferroelectric HfZrO2 FETs for steep switch onset. Microelectronic Engineering, 215, [110991]. https://doi.org/10.1016/j.mee.2019.110991