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Ferroelectric characterization of hafnium-oxide-based ferroelectric memories with remote nitrogen plasma treatments
You Ting Lee, Hsuan Han Chen, Yi Chun Tung, Bing Yang Shih, Szu Yen Hsiung, Tsung Ming Lee, Chih Chieh Hsu, Chien Liu, Hsiao Hsuan Hsu, Chun Yen Chang, Yu Pin Lan, Chun Hu Cheng
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution