Ferroelectric Al:HfO2 negative capacitance FETs

M. H. Lee, P. G. Chen, S. T. Fan, Y. C. Chou, C. Y. Kuo, C. H. Tang, H. H. Chen, S. S. Gu, R. C. Hong, Z. Y. Wang, S. Y. Chen, C. Y. Liao, K. T. Chen, S. T. Chang, M. H. Liao, K. S. Li, C. W. Liu

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    10 Citations (Scopus)

    Abstract

    The first experimental demonstration of ferroelectric Al:HfO2 (FE-HAO) FETs is proceeded with negative capacitance (NC) effect. The subthreshold swing (SS) of 40 mV/dec and 39 mV/dec for forward and reverse sweep, respectively, as well as almost hysteresis-free are achieved. The partial orthorhombic phase of FE-HAO is confirmed both with (PMA) and without (PDA) a capping layer. A gradual transition of polarization after 1000°C annealing is obtained with increasing Al concentration for large remanent polarization (Pr), coercive field (Ec), and high dielectric constant. The similar physical thickness (∼7nm) of ferroelectric-HfZrOx (FE-HZO) FET is discussed for comparison. The NC modeling is performed to validate the NC effect for the Al:HfOx material system. The transient behavior is performed at room temperature and low temperature, and the dynamic NC model is discussed.

    Original languageEnglish
    Title of host publication2017 IEEE International Electron Devices Meeting, IEDM 2017
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages23.3.1-23.3.4
    ISBN (Electronic)9781538635599
    DOIs
    Publication statusPublished - 2018 Jan 23
    Event63rd IEEE International Electron Devices Meeting, IEDM 2017 - San Francisco, United States
    Duration: 2017 Dec 22017 Dec 6

    Publication series

    NameTechnical Digest - International Electron Devices Meeting, IEDM
    ISSN (Print)0163-1918

    Other

    Other63rd IEEE International Electron Devices Meeting, IEDM 2017
    CountryUnited States
    CitySan Francisco
    Period17/12/217/12/6

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering
    • Materials Chemistry

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