Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai; N. F. Chiu; P. C. Liu; Y. C. Ou; H. H. Liao; Y. J. Yang; L. J. Yang; U. Lei; F. S. Chao; S. S. Lu; C. W. Lin; P. Z. Chang; W. P. Shih

doi:10.1109/MEMSYS.2009.4805354

Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai^*, N. F. Chiu, P. C. Liu, Y. C. Ou, H. H. Liao, Y. J. Yang, L. J. Yang, U. Lei, F. S. Chao, S. S. Lu, C. W. Lin, P. Z. Chang, W. P. Shih

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Citations (Scopus)

Abstract

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

Original language	English
Article number	4805354
Pages (from-to)	204-207
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805354
Publication status	Published - 2009
Externally published	Yes
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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Tsai, Y. C., Chiu, N. F., Liu, P. C., Ou, Y. C., Liao, H. H., Yang, Y. J., Yang, L. J., Lei, U., Chao, F. S., Lu, S. S., Lin, C. W., Chang, P. Z., & Shih, W. P. (2009). Fabrication process of integrated multi-analyte biochip system for implantable application. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 204-207. Article 4805354. https://doi.org/10.1109/MEMSYS.2009.4805354

Tsai, YC, Chiu, NF, Liu, PC, Ou, YC, Liao, HH, Yang, YJ, Yang, LJ, Lei, U, Chao, FS, Lu, SS, Lin, CW, Chang, PZ & Shih, WP 2009, 'Fabrication process of integrated multi-analyte biochip system for implantable application', Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 204-207. https://doi.org/10.1109/MEMSYS.2009.4805354

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title = "Fabrication process of integrated multi-analyte biochip system for implantable application",

abstract = "This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.",

author = "Tsai, {Y. C.} and Chiu, {N. F.} and Liu, {P. C.} and Ou, {Y. C.} and Liao, {H. H.} and Yang, {Y. J.} and Yang, {L. J.} and U. Lei and Chao, {F. S.} and Lu, {S. S.} and Lin, {C. W.} and Chang, {P. Z.} and Shih, {W. P.}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805354",

language = "English",

pages = "204--207",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

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AU - Tsai, Y. C.

AU - Chiu, N. F.

AU - Liu, P. C.

AU - Ou, Y. C.

AU - Liao, H. H.

AU - Yang, Y. J.

AU - Yang, L. J.

AU - Lei, U.

AU - Chao, F. S.

AU - Lu, S. S.

AU - Lin, C. W.

AU - Chang, P. Z.

AU - Shih, W. P.

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AB - This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

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Y2 - 25 January 2009 through 29 January 2009

ER -

Fabrication process of integrated multi-analyte biochip system for implantable application

Abstract

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