Fabrication process of integrated multi-analyte biochip system for implantable application

Y. C. Tsai, N. F. Chiu, P. C. Liu, Y. C. Ou, H. H. Liao, Y. J. Yang, L. J. Yang, U. Lei, F. S. Chao, S. S. Lu, C. W. Lin, P. Z. Chang, W. P. Shih

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

Original languageEnglish
Article number4805354
Pages (from-to)204-207
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Tsai, Y. C., Chiu, N. F., Liu, P. C., Ou, Y. C., Liao, H. H., Yang, Y. J., Yang, L. J., Lei, U., Chao, F. S., Lu, S. S., Lin, C. W., Chang, P. Z., & Shih, W. P. (2009). Fabrication process of integrated multi-analyte biochip system for implantable application. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 204-207. [4805354]. https://doi.org/10.1109/MEMSYS.2009.4805354