Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Ya Wen Su; Cen Shawn Wu; Chia Chun Chen; Chii Dong Chen

doi:10.1002/adma.200390008

Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Ya Wen Su^*, Cen Shawn Wu, Chia Chun Chen, Chii Dong Chen

^*Corresponding author for this work

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

63 Citations (Scopus)

Abstract

A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.

Original language	English
Pages (from-to)	49-51
Number of pages	3
Journal	Advanced Materials
Volume	15
Issue number	1
DOIs	https://doi.org/10.1002/adma.200390008
Publication status	Published - 2003 Jan 3

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1002/adma.200390008

Cite this

@article{dc28e4cb251346a7bf7a6e7ec98468d6,

title = "Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition",

abstract = "A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.",

author = "Su, {Ya Wen} and Wu, {Cen Shawn} and Chen, {Chia Chun} and Chen, {Chii Dong}",

year = "2003",

month = jan,

day = "3",

doi = "10.1002/adma.200390008",

language = "English",

volume = "15",

pages = "49--51",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley-VCH Verlag",

number = "1",

}

TY - JOUR

T1 - Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

AU - Su, Ya Wen

AU - Wu, Cen Shawn

AU - Chen, Chia Chun

AU - Chen, Chii Dong

PY - 2003/1/3

Y1 - 2003/1/3

N2 - A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.

AB - A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.

UR - http://www.scopus.com/inward/record.url?scp=0037415147&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037415147&partnerID=8YFLogxK

U2 - 10.1002/adma.200390008

DO - 10.1002/adma.200390008

M3 - Article

AN - SCOPUS:0037415147

SN - 0935-9648

VL - 15

SP - 49

EP - 51

JO - Advanced Materials

JF - Advanced Materials

IS - 1

ER -

Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this