Fabrication of silicon nanopillars array for developing PCs sensor

Mao Jung Huang, Chii-Rong Yang, Chien Ying Su, Ming Hua Shiao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study proposed the use of combined nano-sphere lithography (NSL) and photo-assisted electrochemical etching (PAECE) to generate arrayed nano-pillar with high aspect ratio on silicon wafer, and then used for the application of photonic crystals (PCs) Sensor. The experiment result indicates the NSL can conveniently define nano-array and PAECE technique can effectively yield nano-pores and nano-pillars. The nano-pore, depth of 2.3 μm and diameter of 90 nm, was generated by 1 V PAECE. When the bias of PAECE was enlarged to 2.2 V, nano-pillar array was produced with 2 μm in height, 100 nm in diameter and 201 for aspect ratio. The PCs sensor detection platform was composed by laser of 1550 nm, precision translation stage and polarimeter. Through this high sensitive system, we can examine the small bio-molecules of plasmid by means of the polarized variation represented in Poincarè sphere coordinate system.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages237-241
Number of pages5
DOIs
Publication statusPublished - 2013 Sep 2
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: 2013 Apr 72013 Apr 10

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period13/4/713/4/10

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Keywords

  • biosensor
  • nano-pillar
  • nano-sphere lithography
  • photoelectrochemical etching

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

Cite this

Huang, M. J., Yang, C-R., Su, C. Y., & Shiao, M. H. (2013). Fabrication of silicon nanopillars array for developing PCs sensor. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 237-241). [6559723] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559723