Fabrication of silicon nanopillar arrays and application on direct methanol fuel cell

Yu Hsiang Tang, Mao Jung Huang, Ming Hua Shiao, Chii-Rong Yang

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We present a simple method that combines self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to fabricate near-perfect and orderly arranged nanopillar arrays for the direct methanol fuel cells electrode (DMFCs) applications. The nanosphere arrays were fabricated by combining thin photoresist grid structure and ultrasonic vibration coating processes. The fabricated nanopillars are with 1.56 μm in height and 250 nm in diameter showing aspect ratio as high as 6.2. Furthermore, PAECE with applying various voltages to produce nanostructure arrays, resulting in different specific surface area for the electrode fabrication of fuel cell was investigated as well. Comparing with typical planar electrodes, the maximum power density of 58.4 W/cm2 for nanopillar electrodes is 6.3 times of that for typical planar electrodes with maximum power density of 9.3 W/cm 2. These results indicated that the improved performance of the fuel cell is because of the increased contact surface area between the catalyst and fuel cell by utilizing nanopillar arrays.

Original languageEnglish
Pages (from-to)2580-2583
Number of pages4
JournalMicroelectronic Engineering
Volume88
Issue number8
DOIs
Publication statusPublished - 2011 Aug 1

Fingerprint

Direct methanol fuel cells (DMFC)
Silicon
fuel cells
methyl alcohol
Fabrication
Electrodes
fabrication
electrodes
silicon
Electrochemical etching
Fuel cells
Nanospheres
radiant flux density
etching
Photoresists
photoresists
Specific surface area
Lithography
Vibrations (mechanical)
coating

Keywords

  • Direct methanol fuel cell
  • Nanopillar
  • Photo-assisted electrochemical etching
  • Self-assembled nanosphere lithography

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Fabrication of silicon nanopillar arrays and application on direct methanol fuel cell. / Tang, Yu Hsiang; Huang, Mao Jung; Shiao, Ming Hua; Yang, Chii-Rong.

In: Microelectronic Engineering, Vol. 88, No. 8, 01.08.2011, p. 2580-2583.

Research output: Contribution to journalArticle

Tang, Yu Hsiang ; Huang, Mao Jung ; Shiao, Ming Hua ; Yang, Chii-Rong. / Fabrication of silicon nanopillar arrays and application on direct methanol fuel cell. In: Microelectronic Engineering. 2011 ; Vol. 88, No. 8. pp. 2580-2583.
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