Fabrication of micro-hole arrays using precision filled wax metal deposition

Shun-Tong Chen, Tsu Sheng Luo

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

This study presents a low-cost hybrid fabrication process that produces micro-holes of less than 200 μm in diameter. First of all, a micro-EDM hole-drilling is employed to perforate micro-holes through the mirror-like substrate (SUS304), which is cylindrical in shape. The oily wax also known as "sacrificial material" is extruded and formed onto the SUS304 substrate, resulting in a precision cylindrical micro-wax pillar mould. A precision electroforming is then conducted to deposit a thick nickel metal layer onto the substrate, and subsequently the wax mould is completely removed and revealed a perforated micro-hole array after releasing from the substrate. Experimental results show that the wax mould has an excellent duplication capability. The finished micro-hole array has an average hole-diameter of 165.3 μm and demonstrates ideal geometric accuracy. The proposed approach can significantly cost down and contribute to the precision machining industry.

Original languageEnglish
Pages (from-to)504-509
Number of pages6
JournalJournal of Materials Processing Technology
Volume210
Issue number3
DOIs
Publication statusPublished - 2010 Feb 1

Fingerprint

Waxes
Fabrication
Metals
Substrates
Substrate
Electroforming
Nickel
Costs
Drilling
Machining
Mirrors
Deposits
Duplication
Mirror
Industry
Experimental Results
Demonstrate

Keywords

  • EDM hole-drilling
  • Filled wax metal deposition
  • Wax pillar

ASJC Scopus subject areas

  • Ceramics and Composites
  • Computer Science Applications
  • Metals and Alloys
  • Industrial and Manufacturing Engineering

Cite this

Fabrication of micro-hole arrays using precision filled wax metal deposition. / Chen, Shun-Tong; Luo, Tsu Sheng.

In: Journal of Materials Processing Technology, Vol. 210, No. 3, 01.02.2010, p. 504-509.

Research output: Contribution to journalArticle

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