Fabrication of diffraction grating in polydimethylsiloxane using femtosecond-pulsed laser micromachining

Tien-Li Chang, Shao Wei Luo, Han Ping Yang, Chi Hung Lee

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

This study investigates a new process for fabricating a diffraction grating in a flexible polydimethylsiloxane (PDMS) sheet by using a high-intensity femtosecond-pulsed laser (FS-laser). Unlike soft-lithography with the bonding technique, FS-laser direct writing provides a unique micromachining method for fabricating an embedded diffraction grating (inside a PDMS substrate) with laser pulses of visible light. This approach is a nonlinear mask-less process for rapid prototyping. The wavelength of the FS-laser beam is frequency-doubled to 517 nm. The repetition rate and pulse width of the FS-laser system are 100 kHz and 350 fs, respectively. An embedded PDMS diffraction grating is successfully demonstrated based on a calculated optical phase shift structure. Crown

Original languageEnglish
Pages (from-to)1344-1347
Number of pages4
JournalMicroelectronic Engineering
Volume87
Issue number5-8
DOIs
Publication statusPublished - 2010 May 1

Fingerprint

laser machining
Micromachining
Diffraction gratings
Polydimethylsiloxane
gratings (spectra)
Pulsed lasers
pulsed lasers
Fabrication
fabrication
Laser pulses
rapid prototyping
Rapid prototyping
micromachining
Phase shift
high power lasers
Lithography
Laser beams
Masks
repetition
pulse duration

Keywords

  • Diffraction grating
  • Femtosecond laser
  • Micromachining
  • PDMS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Fabrication of diffraction grating in polydimethylsiloxane using femtosecond-pulsed laser micromachining. / Chang, Tien-Li; Luo, Shao Wei; Yang, Han Ping; Lee, Chi Hung.

In: Microelectronic Engineering, Vol. 87, No. 5-8, 01.05.2010, p. 1344-1347.

Research output: Contribution to journalArticle

Chang, Tien-Li ; Luo, Shao Wei ; Yang, Han Ping ; Lee, Chi Hung. / Fabrication of diffraction grating in polydimethylsiloxane using femtosecond-pulsed laser micromachining. In: Microelectronic Engineering. 2010 ; Vol. 87, No. 5-8. pp. 1344-1347.
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