Fabrication of a fuel cell electrode with a high-aspect-ratio nanostructure array

Mao Jung Huang; Chii Rong Yang; Rong Tsong Lee; Yuang Cherng Chiou

doi:10.1088/0960-1317/19/4/045003

Fabrication of a fuel cell electrode with a high-aspect-ratio nanostructure array

Mao Jung Huang, Chii Rong Yang^*, Rong Tsong Lee, Yuang Cherng Chiou

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The study presents a combination of self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to cost-effectively form an arrayed nanostructure on the silicon wafer. The aspect ratio of the pores in this nanoarray fabricated through PAECE is around 22:1. Tuning the etching voltage can convert the nanopore array to a nanopillar array with an aspect ratio of about 20:1. Finally, a two-staged PAECE is used to produce a nanopillar arrays for the production of fuel cell electrodes. Its reaction current of 10.2 mA is 72.9 times higher than that obtained by a planar electrode.

Original language	English
Article number	045003
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/19/4/045003
Publication status	Published - 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/19/4/045003

Cite this

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abstract = "The study presents a combination of self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to cost-effectively form an arrayed nanostructure on the silicon wafer. The aspect ratio of the pores in this nanoarray fabricated through PAECE is around 22:1. Tuning the etching voltage can convert the nanopore array to a nanopillar array with an aspect ratio of about 20:1. Finally, a two-staged PAECE is used to produce a nanopillar arrays for the production of fuel cell electrodes. Its reaction current of 10.2 mA is 72.9 times higher than that obtained by a planar electrode.",

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AB - The study presents a combination of self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to cost-effectively form an arrayed nanostructure on the silicon wafer. The aspect ratio of the pores in this nanoarray fabricated through PAECE is around 22:1. Tuning the etching voltage can convert the nanopore array to a nanopillar array with an aspect ratio of about 20:1. Finally, a two-staged PAECE is used to produce a nanopillar arrays for the production of fuel cell electrodes. Its reaction current of 10.2 mA is 72.9 times higher than that obtained by a planar electrode.

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Fabrication of a fuel cell electrode with a high-aspect-ratio nanostructure array

Abstract

ASJC Scopus subject areas

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