Fabrication of a fuel cell electrode with a high-aspect-ratio nanostructure array

Mao Jung Huang, Chii-Rong Yang, Rong Tsong Lee, Yuang Cherng Chiou

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The study presents a combination of self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to cost-effectively form an arrayed nanostructure on the silicon wafer. The aspect ratio of the pores in this nanoarray fabricated through PAECE is around 22:1. Tuning the etching voltage can convert the nanopore array to a nanopillar array with an aspect ratio of about 20:1. Finally, a two-staged PAECE is used to produce a nanopillar arrays for the production of fuel cell electrodes. Its reaction current of 10.2 mA is 72.9 times higher than that obtained by a planar electrode.

Original languageEnglish
Article number045003
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number4
DOIs
Publication statusPublished - 2009 Aug 21

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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