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Fabrication and electron transport in vertical silicon-silicon nitride-silicon multilayer nano-pillars

  • Shu Fen Hu*
  • , Hsien Hsun Yang
  • , Heng Tien Lin
  • , Chin Lung Sung
  • , Yue Min Wan
    • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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