Fabrication and characterization of high-Tc YBa 2Cu3O7-x nanoSQUIDs made by focused ion beam milling

C. H. Wu, Y. T. Chou, W. C. Kuo, J. H. Chen, L. M. Wang, J. C. Chen, K. L. Chen, U. C. Sou, H. C. Yang, J. T. Jeng

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36 Citations (Scopus)


We have fabricated high-Tc nanoscale superconducting quantum interference devices (nanoSQUIDs) with a hole size of 250 nm × 250 nm based on a 100 nm bridge at 77 K by focused ion beam milling and ion implantation. At 78 K, the curve of the voltage branch became roughly linear and agreed with the Josephson-like behavior. The sample exhibited strong flux flow behavior at temperatures under 76 K. The voltage flux characteristic curves, V -Imod, of the nanoSQUID at different bias currents at 78 K were observed. Typically, critical currents of 15 νA and peak-to-peak values of the voltage flux transfer function of 3.7 νV were measured. The measured data strongly suggest that the weak link structure could be a superconducting metal with a critical temperature Tc′ smaller than that (T c) of other YBa2Cu3O7-x (YBCO) films. This fabrication method of combining a nanobridge and ion implantation can improve the yield of nanojunctions and nanoSQUIDs.

Original languageEnglish
Article number315304
Issue number31
Publication statusPublished - 2008 Aug 6

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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