Abstract
The Raman spectra of hydrogenated and deuterated amorphous silicon films (a-Si:H, a-Si:D) have been investigated. It is suggested that the asymmetrical broadening of the transverse-optical (TO) Raman peak of a-Si:D compared to the TO Raman peak of a-Si:H results from the coupling between the Si-D wagging mode and the Si-Si TO phonon mode rather than the structural difference.
Original language | English |
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Pages (from-to) | 3347-3349 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 74 |
Issue number | 22 |
DOIs | |
Publication status | Published - 1999 May 31 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)