Evidence for coupling of Si-Si lattice vibration and Si-D wagging vibration in deuterated amorphous silicon

An Shih, Si Chen Lee, Chih Ta Chia

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The Raman spectra of hydrogenated and deuterated amorphous silicon films (a-Si:H, a-Si:D) have been investigated. It is suggested that the asymmetrical broadening of the transverse-optical (TO) Raman peak of a-Si:D compared to the TO Raman peak of a-Si:H results from the coupling between the Si-D wagging mode and the Si-Si TO phonon mode rather than the structural difference.

Original languageEnglish
Pages (from-to)3347-3349
Number of pages3
JournalApplied Physics Letters
Issue number22
Publication statusPublished - 1999 May 31


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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