Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate

Bo Ching He, Chun Hu Cheng, Hua Chiang Wen, Yi Shao Lai, Ping Feng Yang, Meng Hung Lin, Wen Fa Wu, Chang Pin Chou

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy