Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate

Bo Ching He, Chun Hu Cheng*, Hua Chiang Wen, Yi Shao Lai, Ping Feng Yang, Meng Hung Lin, Wen Fa Wu, Chang Pin Chou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

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Material Science