Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate
- Bo Ching He
- , Chun Hu Cheng*
- , Hua Chiang Wen
- , Yi Shao Lai
- , Ping Feng Yang
- , Meng Hung Lin
- , Wen Fa Wu
- , Chang Pin Chou
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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