Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods

Chi Yo Huang*, Pei Han Chung, Joseph Z. Shyu, Yao Hua Ho, Chao Hsin Wu, Ming Che Lee, Ming Jenn Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.

Original languageEnglish
Article number3451
JournalSustainability (Switzerland)
Issue number10
Publication statusPublished - 2018 Sept 27


  • Micro electro mechanic systems (MEMS)
  • Multiple criteria decision making (MCDM)
  • PM2.5
  • Particulate matter (PM)
  • Sensors

ASJC Scopus subject areas

  • Geography, Planning and Development
  • Renewable Energy, Sustainability and the Environment
  • Environmental Science (miscellaneous)
  • Energy Engineering and Power Technology
  • Management, Monitoring, Policy and Law


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