Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods

Chi Yo Huang, Pei Han Chung, Joseph Z. Shyu, Yao Hua Ho, Chao Hsin Wu, Ming Che Lee, Ming Jenn Wu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.

Original languageEnglish
Article number3451
JournalSustainability (Switzerland)
Volume10
Issue number10
DOIs
Publication statusPublished - 2018 Sep 27

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decision making criterion
particulate matter
gallium
Decision making
decision making
air pollution
sensor
Air pollution
Sensors
atmospheric pollution
health industry
evaluation
expert
Gallium nitride
etching
Gallium arsenide
industry
research facility
Chemical sensors
industrialization

Keywords

  • Micro electro mechanic systems (MEMS)
  • Multiple criteria decision making (MCDM)
  • PM2.5
  • Particulate matter (PM)
  • Sensors

ASJC Scopus subject areas

  • Geography, Planning and Development
  • Renewable Energy, Sustainability and the Environment
  • Management, Monitoring, Policy and Law

Cite this

Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods. / Huang, Chi Yo; Chung, Pei Han; Shyu, Joseph Z.; Ho, Yao Hua; Wu, Chao Hsin; Lee, Ming Che; Wu, Ming Jenn.

In: Sustainability (Switzerland), Vol. 10, No. 10, 3451, 27.09.2018.

Research output: Contribution to journalArticle

Huang, Chi Yo ; Chung, Pei Han ; Shyu, Joseph Z. ; Ho, Yao Hua ; Wu, Chao Hsin ; Lee, Ming Che ; Wu, Ming Jenn. / Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods. In: Sustainability (Switzerland). 2018 ; Vol. 10, No. 10.
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