ESD protection design for 60-GHz LNA with inductor-triggered SCR in 65-nm CMOS process

Chun Yu Lin*, Li Wei Chu, Ming Dou Ker

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


To effectively protect the radio-frequency (RF) circuits in nanoscale CMOS technology from electrostatic discharge (ESD) damages, the silicon-controlled rectifier (SCR) devices have been used as main on-chip ESD protection devices due to their high ESD robustness and low parasitic capacitance. In this paper, an SCR device assisted with an inductor is proposed to improve the turn-on efficiency for ESD protection. Besides, the inductor can be also designed to resonate with the parasitic capacitance of the SCR device at the selected frequency band for RF performance fine tuning. Experimental results of the ESD protection design with inductor-triggered SCR in a nanoscale CMOS process have been successfully verified at 60-GHz frequency. The ESD protection design with inductor-triggered SCR has been implemented in cell configuration with compact size, which can be directly used in the RF receiver circuits. To verify the RF characteristics and ESD robustness in the RF receiver, the inductor-triggered SCR has been applied to a 60-GHz low-noise amplifier (LNA). Verified in a silicon chip, the 60-GHz LNA with the inductor-triggered SCR can achieve good RF performances and high ESD robustness.

Original languageEnglish
Article number06129526
Pages (from-to)714-723
Number of pages10
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number3 PART 2
Publication statusPublished - 2012 Mar
Externally publishedYes


  • 60 GHz
  • Electrostatic discharge (ESD)
  • low-noise amplifier (LNA)
  • silicon-controlled rectifier (SCR)

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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