Electron detrapping in thin hafnium silicate and nitrided hafnium silicate gate dielectric stacks

Heng Sheng Huang*, Piyas Samanta, Tsung Jian Tzeng, Shuang Yuan Chen, Chuan Hsi Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Physics & Astronomy