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Electron detrapping in thin hafnium silicate and nitrided hafnium silicate gate dielectric stacks
Heng Sheng Huang*, Piyas Samanta, Tsung Jian Tzeng, Shuang Yuan Chen, Chuan Hsi Liu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)