Effects of thickness on the properties of indium-doped zinc oxide films

Chia Ching Wu, Chien Chen Diao, Chih Chin Yang, Yi Chieh Chao, Chin Guo Kuo, Cheng Fu Yang

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    In this study, radio frequency magnetron sputtering was used to deposit indium-doped zinc oxide (IZO) films with varying deposition time on glass substrates. The structural, optical, and resistivity properties of IZO films were investigated with field emission scanning electron microscope, X-ray diffraction patterns, UV–visible spectroscopy, and Hall-effect analysis. XRD analysis on IZO films showed that only the (002) diffraction peak was observable, indicating that the IZO films showed a good c-axis orientation perpendicular to the glass substrates. As the deposition time of IZO films increased from 30 to 90 min, the thickness increased from 237 to 389 nm, the grain size increased from 12.3 to 87.6 nm, and the resistivity decreased from 9.08 9 10-3 to 2.85 9 10-3 X-cm. The transmittance was found to slightly decrease with the increasing thickness of IZO films.

    Original languageEnglish
    Title of host publicationProceedings of the 2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013
    EditorsCheng-Yi Chen, Cheng-Fu Yang, Jengnan Juang
    PublisherSpringer Verlag
    Pages187-194
    Number of pages8
    ISBN (Electronic)9783319045726
    DOIs
    Publication statusPublished - 2014 Jan 1
    Event2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013 - Kaohsiung, Taiwan
    Duration: 2013 Dec 122013 Dec 14

    Publication series

    NameLecture Notes in Electrical Engineering
    Volume293
    ISSN (Print)1876-1100
    ISSN (Electronic)1876-1119

    Other

    Other2nd International Conference on Intelligent Technologies and Engineering Systems, ICITES 2013
    CountryTaiwan
    CityKaohsiung
    Period13/12/1213/12/14

    Keywords

    • Indium-doped zinc oxide
    • RF magnetron sputtering
    • Thickness
    • Transparent conductive oxide

    ASJC Scopus subject areas

    • Industrial and Manufacturing Engineering

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