Effects of post annealing temperatures on the properties of Sr 0.6Ba0.4Nb2O6 thin films

Cheng Fu Yang, Chin Guo Kuo, Tai Ping Sun, Sung Mao Wu, Wen Ray Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sr0.6Ba0.4Nb2O6 (SBN) thin films were deposited using radio frequency (RF) magnetron sputtering method and post annealing in a conventional furnace. The annealing process had improved the crystallization and also had large influences on the crystalline orientation. As the annealing temperature increased from 600°C to 700 °C, the diffraction intensities of (410) and (001) planes increased. Annealed at 800°C, the SBN thin films showed highly c-axis crystalline orientation of (001) plane. The influences of annealing temperatures on the electrical characteristics of the polarization-applied electric field curves, the capacitance-voltage curves, and the leakage current density-electric field curves were investigated.

Original languageEnglish
Title of host publication4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
Publication statusPublished - 2011 Sep 26
Event4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
Duration: 2011 Jun 212011 Jun 24

Publication series

NameProceedings - International NanoElectronics Conference, INEC
ISSN (Print)2159-3523

Other

Other4th IEEE International Nanoelectronics Conference, INEC 2011
CountryTaiwan
CityTao-Yuan
Period11/6/2111/6/24

Keywords

  • SrBaNb O
  • annealing
  • crystalline orientation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Effects of post annealing temperatures on the properties of Sr <sub>0.6</sub>Ba<sub>0.4</sub>Nb<sub>2</sub>O<sub>6</sub> thin films'. Together they form a unique fingerprint.

Cite this