Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In-Zn-O films

Shiu Jen Liu; Kuei Ching Wu; Kun Cheng Peng

doi:10.1016/j.materresbull.2015.02.039

Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In-Zn-O films

Shiu Jen Liu^*, Kuei Ching Wu, Kun Cheng Peng

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Amorphous In-Zn-O (a-IZO) films doped with Mo were prepared on glass substrates by using magnetron co-sputtering technique. The Mo concentration was controlled by varying the sputtering power applied on the Mo target. The effects of Mo doping and thermal annealing on the electrical, optical and magnetic properties of the a-IZO films were studied. The electrical properties of a-IZO films were found to be strongly affected by Mo doping and thermal annealing. The optical transmission near the absorption edge of a-IZO films is enhanced by Mo doping due to the decrease in reflection. The optical bandgap estimated to be 3.2 eV of a-IZO films is unaffected by Mo doping and thermal annealing. Moreover, some of Mo-doped films exhibit room-temperature ferromagnetism after annealing.

Original language	English
Pages (from-to)	226-230
Number of pages	5
Journal	Materials Research Bulletin
Volume	66
DOIs	https://doi.org/10.1016/j.materresbull.2015.02.039
Publication status	Published - 2015 Jun

Keywords

A. Amorphous materials
B. Sputtering
D. Electrical properties
D. Magnetic properties
D. Optical properties

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.materresbull.2015.02.039

Cite this

@article{66e61d8900ce4ff0a91c9efb93baac35,

title = "Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In-Zn-O films",

abstract = "Amorphous In-Zn-O (a-IZO) films doped with Mo were prepared on glass substrates by using magnetron co-sputtering technique. The Mo concentration was controlled by varying the sputtering power applied on the Mo target. The effects of Mo doping and thermal annealing on the electrical, optical and magnetic properties of the a-IZO films were studied. The electrical properties of a-IZO films were found to be strongly affected by Mo doping and thermal annealing. The optical transmission near the absorption edge of a-IZO films is enhanced by Mo doping due to the decrease in reflection. The optical bandgap estimated to be 3.2 eV of a-IZO films is unaffected by Mo doping and thermal annealing. Moreover, some of Mo-doped films exhibit room-temperature ferromagnetism after annealing.",

keywords = "A. Amorphous materials, B. Sputtering, D. Electrical properties, D. Magnetic properties, D. Optical properties",

author = "Liu, {Shiu Jen} and Wu, {Kuei Ching} and Peng, {Kun Cheng}",

note = "Publisher Copyright: {\textcopyright} 2015 Published by Elsevier Ltd.",

year = "2015",

month = jun,

doi = "10.1016/j.materresbull.2015.02.039",

language = "English",

volume = "66",

pages = "226--230",

journal = "Materials Research Bulletin",

issn = "0025-5408",

publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In-Zn-O films

AU - Liu, Shiu Jen

AU - Wu, Kuei Ching

AU - Peng, Kun Cheng

PY - 2015/6

Y1 - 2015/6

N2 - Amorphous In-Zn-O (a-IZO) films doped with Mo were prepared on glass substrates by using magnetron co-sputtering technique. The Mo concentration was controlled by varying the sputtering power applied on the Mo target. The effects of Mo doping and thermal annealing on the electrical, optical and magnetic properties of the a-IZO films were studied. The electrical properties of a-IZO films were found to be strongly affected by Mo doping and thermal annealing. The optical transmission near the absorption edge of a-IZO films is enhanced by Mo doping due to the decrease in reflection. The optical bandgap estimated to be 3.2 eV of a-IZO films is unaffected by Mo doping and thermal annealing. Moreover, some of Mo-doped films exhibit room-temperature ferromagnetism after annealing.

AB - Amorphous In-Zn-O (a-IZO) films doped with Mo were prepared on glass substrates by using magnetron co-sputtering technique. The Mo concentration was controlled by varying the sputtering power applied on the Mo target. The effects of Mo doping and thermal annealing on the electrical, optical and magnetic properties of the a-IZO films were studied. The electrical properties of a-IZO films were found to be strongly affected by Mo doping and thermal annealing. The optical transmission near the absorption edge of a-IZO films is enhanced by Mo doping due to the decrease in reflection. The optical bandgap estimated to be 3.2 eV of a-IZO films is unaffected by Mo doping and thermal annealing. Moreover, some of Mo-doped films exhibit room-temperature ferromagnetism after annealing.

KW - A. Amorphous materials

KW - B. Sputtering

KW - D. Electrical properties

KW - D. Magnetic properties

KW - D. Optical properties

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U2 - 10.1016/j.materresbull.2015.02.039

DO - 10.1016/j.materresbull.2015.02.039

M3 - Article

AN - SCOPUS:84923796935

SN - 0025-5408

VL - 66

SP - 226

EP - 230

JO - Materials Research Bulletin

JF - Materials Research Bulletin

ER -

Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In-Zn-O films

Abstract

Keywords

ASJC Scopus subject areas

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