Effects of mold pattern with anti-adhesive treatment in nanoimprint lithography
- T. L. Chang
- , F. Y. Chang
- , H. Y. Lin
- , W. L. Lai
- , J. H. Tsai
- , S. H. Chang
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution