Fingerprint
Dive into the research topics of 'Effects of mechanical agitation and surfactant additive on silicon anisotropic etching in alkaline KOH solution'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of mechanical agitation and surfactant additive on silicon anisotropic etching in alkaline KOH solution
Chii Rong Yang*, Po Ying Chen, Yuang Cherng Chiou, Rong Tsong Lee
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
98
Citations
(Scopus)