Effects of growth temperature on Mg-doped ZnO films fabricated by pulsed-laser deposition

Hau Wei Fang, Jenh Yih Juang, Shiu-Jen Liu

Research output: Contribution to journalArticle

Abstract

Magnesium-doped zinc oxide (MZO) films were fabricated by pulsed-laser deposition (PLD) at various substrate temperatures (Ts). The substitution of Mg for Zn sites (MgZn) in the films was confirmed by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and room-temperature photoluminescence (RTPL) measurements. Characteristic deep-level emissions (DLE) observed in the RTPL spectra further indicate the presence of Zn vacancies (VZn) in the MZO films. Moreover, it was found that the intensity of the blue emission corresponding to VZn increases with increasing Ts, indicating the important role played by Ts on the incorporation of Mg into ZnO matrix. Hall effect measurements reveal the p-type conduction of the MZO films grown at 400°C. The p-type characteristic is attributed to the formation of nMgZn - VZn complex which could act as acceptor for MZO films.

Original languageEnglish
Pages (from-to)992-1000
Number of pages9
JournalInternational Journal of Nanotechnology
Volume14
Issue number12
DOIs
Publication statusPublished - 2017 Jan 1

Fingerprint

Growth temperature
Zinc Oxide
Pulsed laser deposition
zinc oxides
pulsed laser deposition
oxide films
magnesium
Zinc oxide
Magnesium
Oxide films
Photoluminescence
photoluminescence
Temperature
temperature
room temperature
Hall effect
x rays
Vacancies
photoelectron spectroscopy
substitutes

Keywords

  • Mg doping
  • PLD
  • X-ray photoelectron spectroscopy
  • XPS
  • ZnO films
  • p-type
  • photoluminescence
  • pulsed-laser deposition

ASJC Scopus subject areas

  • Bioengineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Effects of growth temperature on Mg-doped ZnO films fabricated by pulsed-laser deposition. / Fang, Hau Wei; Juang, Jenh Yih; Liu, Shiu-Jen.

In: International Journal of Nanotechnology, Vol. 14, No. 12, 01.01.2017, p. 992-1000.

Research output: Contribution to journalArticle

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