Effects of deposition parameters on the structure and properties of ZrN, WN and ZrWN films

C. Y. Wu, J. H. Chen, C. G. Kuo, M. J. Twu, S. W. Peng, C. Y. Hsu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

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