Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film

Y. C. Lee; S. J. Lin; C. T. Chia; H. F. Cheng; I. N. Lin

doi:10.1016/j.diamond.2004.10.015

Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film

Y. C. Lee, S. J. Lin, C. T. Chia, H. F. Cheng, I. N. Lin^*

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

The nucleation behavior of nanodiamond films and the associated electron field emission properties were investigated. Among the important CVD parameters, the methane/hydrogen ratio and the total pressure impose most markedly effect, whereas the microwave power and the boron content show least significant effect on the nucleation behavior for the nanodiamonds. Presumably, the prime factor modifying the rate of formation of diamond nuclei is the proportion of C ⁺- and H⁺-species contained in the plasma. The bias voltage applied for nucleation of diamonds show more marked effect on improving the electron field emission capacity for the nanodiamonds than the boron-content does. It is ascribed to the increase in proportion of grain boundaries, as the grain boundaries are highly conductive and are good emission sites.

Original language	English
Pages (from-to)	296-301
Number of pages	6
Journal	Diamond and Related Materials
Volume	14
Issue number	3-7
DOIs	https://doi.org/10.1016/j.diamond.2004.10.015
Publication status	Published - 2005 Mar

Keywords

Bias enhanced nucleation and growth
Electron field emission
Nanodiamond

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Chemistry
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2004.10.015

Cite this

@article{6641693dfb9449ecbb1e0811b76bf4b0,

title = "Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film",

abstract = "The nucleation behavior of nanodiamond films and the associated electron field emission properties were investigated. Among the important CVD parameters, the methane/hydrogen ratio and the total pressure impose most markedly effect, whereas the microwave power and the boron content show least significant effect on the nucleation behavior for the nanodiamonds. Presumably, the prime factor modifying the rate of formation of diamond nuclei is the proportion of C +- and H+-species contained in the plasma. The bias voltage applied for nucleation of diamonds show more marked effect on improving the electron field emission capacity for the nanodiamonds than the boron-content does. It is ascribed to the increase in proportion of grain boundaries, as the grain boundaries are highly conductive and are good emission sites.",

keywords = "Bias enhanced nucleation and growth, Electron field emission, Nanodiamond",

author = "Lee, {Y. C.} and Lin, {S. J.} and Chia, {C. T.} and Cheng, {H. F.} and Lin, {I. N.}",

note = "Funding Information: The authors would like to thank the National Science Council, R.O.C. for the support of this research through the project no. NSC 92-2216-E-032-005.",

year = "2005",

month = mar,

doi = "10.1016/j.diamond.2004.10.015",

language = "English",

volume = "14",

pages = "296--301",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

number = "3-7",

}

TY - JOUR

T1 - Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film

AU - Lee, Y. C.

AU - Lin, S. J.

AU - Chia, C. T.

AU - Cheng, H. F.

AU - Lin, I. N.

N1 - Funding Information: The authors would like to thank the National Science Council, R.O.C. for the support of this research through the project no. NSC 92-2216-E-032-005.

PY - 2005/3

Y1 - 2005/3

N2 - The nucleation behavior of nanodiamond films and the associated electron field emission properties were investigated. Among the important CVD parameters, the methane/hydrogen ratio and the total pressure impose most markedly effect, whereas the microwave power and the boron content show least significant effect on the nucleation behavior for the nanodiamonds. Presumably, the prime factor modifying the rate of formation of diamond nuclei is the proportion of C +- and H+-species contained in the plasma. The bias voltage applied for nucleation of diamonds show more marked effect on improving the electron field emission capacity for the nanodiamonds than the boron-content does. It is ascribed to the increase in proportion of grain boundaries, as the grain boundaries are highly conductive and are good emission sites.

AB - The nucleation behavior of nanodiamond films and the associated electron field emission properties were investigated. Among the important CVD parameters, the methane/hydrogen ratio and the total pressure impose most markedly effect, whereas the microwave power and the boron content show least significant effect on the nucleation behavior for the nanodiamonds. Presumably, the prime factor modifying the rate of formation of diamond nuclei is the proportion of C +- and H+-species contained in the plasma. The bias voltage applied for nucleation of diamonds show more marked effect on improving the electron field emission capacity for the nanodiamonds than the boron-content does. It is ascribed to the increase in proportion of grain boundaries, as the grain boundaries are highly conductive and are good emission sites.

KW - Bias enhanced nucleation and growth

KW - Electron field emission

KW - Nanodiamond

UR - http://www.scopus.com/inward/record.url?scp=18444364984&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18444364984&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2004.10.015

DO - 10.1016/j.diamond.2004.10.015

M3 - Article

AN - SCOPUS:18444364984

SN - 0925-9635

VL - 14

SP - 296

EP - 301

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 3-7

ER -

Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film

Abstract

Keywords

ASJC Scopus subject areas

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