@inproceedings{29ebac6f2ac341d78892e55adcdbd291,
title = "Effect of acid etching durations on surface roughness and residual stresses of lightweight glass ceramic",
abstract = "The present study is aimed at investigating the effect of acid etching durations on the surface roughness and birefringence of lightweight mirrors made of ZERODUR{\textregistered} glass ceramic. Four acid etching durations (15, 20, 25 and 30 min) have been chosen at a fixed concentration. By using the photoelasticity, surface profiler and laser microscope, the results before and after acid etching have been obtained. It is found the maximum value of the retardation for the polished lightweight ZERODUR{\textregistered} mirror is up to 30 nm. In addition, residual stresses induced by the grinding process with an average grain size of 149 μm are relived after removing ZERODUR{\textregistered} material of a thickness of 60 μm.",
keywords = "Acid etching, Lightweighting, Residual stress, Subsurface roughness, ZERODUR{\textregistered} mirror",
author = "Chan, {Chia Yen} and Chen, {Yi Cheng} and Yang, {Chii Rong} and Huang, {Ting Ming}",
year = "2013",
doi = "10.4028/www.scientific.net/AMM.284-287.77",
language = "English",
isbn = "9783037856123",
series = "Applied Mechanics and Materials",
pages = "77--82",
booktitle = "Innovation for Applied Science and Technology",
note = "2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 ; Conference date: 02-11-2012 Through 06-11-2012",
}