Effect of acid etching durations on surface roughness and residual stresses of lightweight glass ceramic

Chia Yen Chan, Yi Cheng Chen, Chii Rong Yang, Ting Ming Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The present study is aimed at investigating the effect of acid etching durations on the surface roughness and birefringence of lightweight mirrors made of ZERODUR® glass ceramic. Four acid etching durations (15, 20, 25 and 30 min) have been chosen at a fixed concentration. By using the photoelasticity, surface profiler and laser microscope, the results before and after acid etching have been obtained. It is found the maximum value of the retardation for the polished lightweight ZERODUR® mirror is up to 30 nm. In addition, residual stresses induced by the grinding process with an average grain size of 149 μm are relived after removing ZERODUR® material of a thickness of 60 μm.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages77-82
Number of pages6
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12/11/212/11/6

Keywords

  • Acid etching
  • Lightweighting
  • Residual stress
  • Subsurface roughness
  • ZERODUR® mirror

ASJC Scopus subject areas

  • Engineering(all)

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