TY - JOUR
T1 - Dual-stage piezoelectric nano-positioner utilizing a range-extended optical fiber Fabry-Perot interferometer
AU - Hung, Shao Kang
AU - Hwu, En Te
AU - Chen, Mei Yung
AU - Fu, Li Chen
N1 - Funding Information:
Manuscript received March 1, 2006; revised December 15, 2006. Recommended by Guest Editors H.-P. Huang and F.-T. Cheng. This work was supported in part by the National Science Council, R.O.C., under Grant NSC-94-2752-E-002-007-PAE. S.-K. Hung and L.-C. Fu are with the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan, R.O.C. (e-mail: [email protected]; [email protected]). E.-T. Hwu is with the Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan, R.O.C. (e-mail: [email protected]). M.-Y. Chen is with the Department of Industrial Education, National Taiwan Normal University, Taipei 10617, Taiwan, R.O.C. (e-mail: [email protected]). Digital Object Identifier 10.1109/TMECH.2007.897264
PY - 2007/6
Y1 - 2007/6
N2 - This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry.
AB - This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry.
KW - Adaptive control
KW - Interferometry
KW - Modulation
KW - Nanopositioning
KW - Optical fiber
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U2 - 10.1109/TMECH.2007.897264
DO - 10.1109/TMECH.2007.897264
M3 - Article
AN - SCOPUS:34347375514
SN - 1083-4435
VL - 12
SP - 291
EP - 298
JO - IEEE/ASME Transactions on Mechatronics
JF - IEEE/ASME Transactions on Mechatronics
IS - 3
ER -