Dual-stage piezoelectric nano-positioner utilizing a range-extended optical fiber Fabry-Perot interferometer

Shao Kang Hung, En Te Hwu, Mei Yung Chen, Li Chen Fu

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry.

Original languageEnglish
Pages (from-to)291-298
Number of pages8
JournalIEEE/ASME Transactions on Mechatronics
Volume12
Issue number3
DOIs
Publication statusPublished - 2007 Jun 1

Keywords

  • Adaptive control
  • Interferometry
  • Modulation
  • Nanopositioning
  • Optical fiber

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

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