Fingerprint
Dive into the research topics of 'Dual-axis maglev guiding system modeling and controller design for wafer transportation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Dual-axis maglev guiding system modeling and controller design for wafer transportation
Mei Yung Chen*, Ming Jyh Wang, Li Chen Fu
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
3
Citations
(Scopus)