Double nitridation of crystalline ZrO 2 /Al 2 O 3 buffer gate stack with high capacitance, low leakage and improved thermal stability

Jhih Jie Huang, Yi Jen Tsai, Meng Chen Tsai, Min Hung Lee, Miin Jang Chen*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

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Material Science