Dopant diffusion and activation in silicon nanowires fabricated by ex situ doping: A correlative study via atom-probe tomography and scanning tunneling spectroscopy
Zhiyuan Sun, Ori Hazut, Bo Chao Huang, Ya Ping Chiu*, Chia Seng Chang, Roie Yerushalmi, Lincoln J. Lauhon, David N. Seidman
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