Dopant diffusion and activation in silicon nanowires fabricated by ex situ doping: A correlative study via atom-probe tomography and scanning tunneling spectroscopy

Zhiyuan Sun, Ori Hazut, Bo Chao Huang, Ya Ping Chiu*, Chia Seng Chang, Roie Yerushalmi, Lincoln J. Lauhon, David N. Seidman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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