Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors

Cheng Lin Cho, Hsuan ling Kao, Yung Hsien Wu, Li Chun Chang, Chun Hu Cheng

Research output: Contribution to journalArticle

Abstract

In this study, an inkjet-printed dielectric film that used a polymer-based SU-8 ink was fabricated for use in a metal–insulator–metal (MIM) capacitor. Thermal treatment of the inkjet-printed SU-8 polymer film affected its surface morphology, chemical structure, and surface wettability. A 20-min soft-bake at 60°C was applied to eliminate inkjet-printed bubbles and ripples. The ultraviolet-exposed SU-8 polymer film was crosslinked at temperatures between 120°C and 220°C and became disordered at 270°C, demonstrated using Fourier-transform infrared spectroscopy. A maximum SU-8 polymer film hard-bake temperature of 120°C was identified, and a printing process was subsequently employed because the appropriate water contact angle of the printed film was 79°. Under the appropriate inkjet printing conditions, the two-transmission-line method was used to extract the dielectric and electrical properties of the SU-8 polymer film, and the electrical behavior of the fabricated MIM capacitor was also characterized.

Original languageEnglish
Pages (from-to)677-683
Number of pages7
JournalJournal of Electronic Materials
Volume47
Issue number1
DOIs
Publication statusPublished - 2018 Jan 1

Fingerprint

Dielectric films
Polymer films
capacitors
Capacitors
Fabrication
fabrication
polymers
Printing
printing
Ink
Dielectric properties
Contact angle
Fourier transform infrared spectroscopy
Surface morphology
Wetting
Electric lines
Polymers
Electric properties
Heat treatment
inks

Keywords

  • Inkjet printing
  • metal–polymer–metal
  • polymer-based SU-8 ink

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors. / Cho, Cheng Lin; Kao, Hsuan ling; Wu, Yung Hsien; Chang, Li Chun; Cheng, Chun Hu.

In: Journal of Electronic Materials, Vol. 47, No. 1, 01.01.2018, p. 677-683.

Research output: Contribution to journalArticle

Cho, Cheng Lin ; Kao, Hsuan ling ; Wu, Yung Hsien ; Chang, Li Chun ; Cheng, Chun Hu. / Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors. In: Journal of Electronic Materials. 2018 ; Vol. 47, No. 1. pp. 677-683.
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