Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors

Cheng Lin Cho, Hsuan ling Kao, Yung Hsien Wu, Li Chun Chang, Chun Hu Cheng

Research output: Contribution to journalArticle

Abstract

In this study, an inkjet-printed dielectric film that used a polymer-based SU-8 ink was fabricated for use in a metal–insulator–metal (MIM) capacitor. Thermal treatment of the inkjet-printed SU-8 polymer film affected its surface morphology, chemical structure, and surface wettability. A 20-min soft-bake at 60°C was applied to eliminate inkjet-printed bubbles and ripples. The ultraviolet-exposed SU-8 polymer film was crosslinked at temperatures between 120°C and 220°C and became disordered at 270°C, demonstrated using Fourier-transform infrared spectroscopy. A maximum SU-8 polymer film hard-bake temperature of 120°C was identified, and a printing process was subsequently employed because the appropriate water contact angle of the printed film was 79°. Under the appropriate inkjet printing conditions, the two-transmission-line method was used to extract the dielectric and electrical properties of the SU-8 polymer film, and the electrical behavior of the fabricated MIM capacitor was also characterized.

Original languageEnglish
Pages (from-to)677-683
Number of pages7
JournalJournal of Electronic Materials
Volume47
Issue number1
DOIs
Publication statusPublished - 2018 Jan 1

Keywords

  • Inkjet printing
  • metal–polymer–metal
  • polymer-based SU-8 ink

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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