Abstract
The standard steps of P- implantation and silicide block in the complementary metal-oxide semiconductor (CMOS) process are used in this design to implement the proposed diode string. The novel diode string realized by the diodes of P+ with N-well (P+/NW) and P- with N+ (P-/N+) is proposed in this letter. Besides, two diodes are merged together to form a silicon-controlled rectifier path to reduce the clamping voltage during electrostatic discharge (ESD) stress. The test devices of prior and proposed diode strings have been compared in a 0.18 μm CMOS process. With the higher current-handling ability and lower clamping voltage, the proposed diode string can be used as the efficient on-chip ESD protection device.
Original language | English |
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Article number | 7588053 |
Pages (from-to) | 688-690 |
Number of pages | 3 |
Journal | IEEE Transactions on Device and Materials Reliability |
Volume | 16 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2016 Dec |
Keywords
- Diode string
- Electrostatic discharge (ESD)
- Silicon-controlled rectifier (SCR)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Safety, Risk, Reliability and Quality
- Electrical and Electronic Engineering