Diffractive optical element designed by use of an irregular etching-depth sequence

Chung J. Kuo; Hung C. Chien; Ni Y. Chang; Chia H. Yeh

doi:10.1364/AO.40.005894

Diffractive optical element designed by use of an irregular etching-depth sequence

Chung J. Kuo, Hung C. Chien, Ni Y. Chang, Chia H. Yeh

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In fabricating a diffractive optical element the ratio of the etching depth between the (n - 1)th and the nth mask is usually 1(2). We found that the diffraction efficiency of a diffractive optical element can be improved by as much as 7.8% if the above ratio (1(2)) is not kept constant. For achieving this improvement the difference between the desired and the actual diffraction pattern is also used as an objective function for phase quantization.

Original language	English
Pages (from-to)	5894-5897
Number of pages	4
Journal	Applied Optics
Volume	40
Issue number	32
DOIs	https://doi.org/10.1364/AO.40.005894
Publication status	Published - 2001 Nov 10
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.40.005894

Cite this

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abstract = "In fabricating a diffractive optical element the ratio of the etching depth between the (n - 1)th and the nth mask is usually 1(2). We found that the diffraction efficiency of a diffractive optical element can be improved by as much as 7.8% if the above ratio (1(2)) is not kept constant. For achieving this improvement the difference between the desired and the actual diffraction pattern is also used as an objective function for phase quantization.",

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AU - Yeh, Chia H.

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AB - In fabricating a diffractive optical element the ratio of the etching depth between the (n - 1)th and the nth mask is usually 1(2). We found that the diffraction efficiency of a diffractive optical element can be improved by as much as 7.8% if the above ratio (1(2)) is not kept constant. For achieving this improvement the difference between the desired and the actual diffraction pattern is also used as an objective function for phase quantization.

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Diffractive optical element designed by use of an irregular etching-depth sequence

Abstract

ASJC Scopus subject areas

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