Development of new micro gas preconcentrator using novel electroless gold plating process

C. Y. Kuo; P. S. Chen; K. J. Chiu; C. J. Lu; W. C. Tian

doi:10.1109/TRANSDUCERS.2015.7181209

Development of new micro gas preconcentrator using novel electroless gold plating process

C. Y. Kuo, P. S. Chen, K. J. Chiu, C. J. Lu, W. C. Tian

Department of Chemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1456-1459
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181209
Publication status	Published - 2015 Aug 5
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 2015 Jun 21 → 2015 Jun 25

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	2015/06/21 → 2015/06/25

Keywords

electroless gold plating
micro gas chromatography (μGC)
micro gas preconcentrator (μPCT)

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7181209

Cite this

Kuo, C. Y., Chen, P. S., Chiu, K. J., Lu, C. J., & Tian, W. C. (2015). Development of new micro gas preconcentrator using novel electroless gold plating process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1456-1459). [7181209] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181209

Development of new micro gas preconcentrator using novel electroless gold plating process. / Kuo, C. Y.; Chen, P. S.; Chiu, K. J. et al.

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1456-1459 7181209 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kuo, CY, Chen, PS, Chiu, KJ, Lu, CJ & Tian, WC 2015, Development of new micro gas preconcentrator using novel electroless gold plating process. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181209, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 1456-1459, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 2015/06/21. https://doi.org/10.1109/TRANSDUCERS.2015.7181209

Kuo CY, Chen PS, Chiu KJ, Lu CJ, Tian WC. Development of new micro gas preconcentrator using novel electroless gold plating process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1456-1459. 7181209. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181209

Kuo, C. Y. ; Chen, P. S. ; Chiu, K. J. et al. / Development of new micro gas preconcentrator using novel electroless gold plating process. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1456-1459 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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abstract = "This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.",

keywords = "electroless gold plating, micro gas chromatography (μGC), micro gas preconcentrator (μPCT)",

author = "Kuo, {C. Y.} and Chen, {P. S.} and Chiu, {K. J.} and Lu, {C. J.} and Tian, {W. C.}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

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AU - Kuo, C. Y.

AU - Chen, P. S.

AU - Chiu, K. J.

AU - Lu, C. J.

AU - Tian, W. C.

PY - 2015/8/5

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N2 - This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.

AB - This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.

KW - electroless gold plating

KW - micro gas chromatography (μGC)

KW - micro gas preconcentrator (μPCT)

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Development of new micro gas preconcentrator using novel electroless gold plating process

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