Development of a novel micropreconcentrator for micro gas chromatography

W. C. Tian, H. J. Sheen, T. H. Wu, Chia-Jung Lu, W. R. Chen, T. Y. Wei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel micropreconcentrator using a simple one-photomask micromachined process is presented. Instead of using E-beam evaporation to deposit metal wires for heaters of micropreconcentrators, a chemical reaction using microfluidic laminar flow patterning was utilized to deposit metal wires as microheater for micropreconcentrators. Metal deposition using this laminar flow patterning technique provides higher deposition rate and easier microfabrication compared to conventional micromachined technologies. In addition to this laminar flow patterning for microheaters, a unique integrated adsorbent forming technique was developed. The aqueous carbohydrate, serving as adsorbents, was filled into the micropreconcentrator and carbonized at a high temperature. The micropreconcentrator can be heated up to 300°C rapidly by applying a constant electrical power of ∼1 W and a heating rate of 10°C/s. Four volatile organic compounds, acetone, benzene, toluene and xylene, were collected through our novel micropreconcentrators and separated by a 17m long gas chromatography column successfully. The peak width at half height (PWHH) of these four compounds were quite narrow (<1.17s) and the minimum PWHH of 0.72s was obtained using acetone.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2094-2097
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • integrated adsorbent forming
  • laminar flow patterning and silver mirror reaction
  • micropreconcentrator

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Tian, W. C., Sheen, H. J., Wu, T. H., Lu, C-J., Chen, W. R., & Wei, T. Y. (2011). Development of a novel micropreconcentrator for micro gas chromatography. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2094-2097). [5969277] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969277