Abstract
In this paper a multi-function high precision tabletop CNC machine for making micro parts is developed. All the needed machining processes can be earned out on the same machine without unloading, reloading and readjusting the workpiece for subsequent processes. Currently the functions of micro high speed milling. micro-EDM, micro wire-EDM, and micro on-line measurement have been accomplished and tested. A dual-spindle is designed for micro CNC milling, microelectrode fabrication and micro-EDM. A novel mechanism that allows versatile cutting by a 20 μm diameter wire is designed for micro wire-EDM. Various micro parts and high aspect ratio microstructure are successfully fabricated. Furthermore, based on the "short-circuit principle" an on-line micro part measuring system is developed and implemented.
| Original language | English |
|---|---|
| Title of host publication | LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century |
| Pages | 485-490 |
| Number of pages | 6 |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan Duration: 2005 Oct 19 → 2005 Oct 22 |
Other
| Other | 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 |
|---|---|
| Country | Japan |
| City | Nagoya |
| Period | 05/10/19 → 05/10/22 |
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Keywords
- High aspect ratio
- Micro high speed milling
- Micro measuring on-line
- Micro wire-edm
- Micro-edm
- Tabletop cnc machine
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
Cite this
Development of a multi-function high precision tabletop cnc machine for making micro parts. / Liao, Yunn Shiuan; Chen, Shun Tong; Lin, Chang Sheng.
LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century. 2005. p. 485-490.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of a multi-function high precision tabletop cnc machine for making micro parts
AU - Liao, Yunn Shiuan
AU - Chen, Shun Tong
AU - Lin, Chang Sheng
PY - 2005
Y1 - 2005
N2 - In this paper a multi-function high precision tabletop CNC machine for making micro parts is developed. All the needed machining processes can be earned out on the same machine without unloading, reloading and readjusting the workpiece for subsequent processes. Currently the functions of micro high speed milling. micro-EDM, micro wire-EDM, and micro on-line measurement have been accomplished and tested. A dual-spindle is designed for micro CNC milling, microelectrode fabrication and micro-EDM. A novel mechanism that allows versatile cutting by a 20 μm diameter wire is designed for micro wire-EDM. Various micro parts and high aspect ratio microstructure are successfully fabricated. Furthermore, based on the "short-circuit principle" an on-line micro part measuring system is developed and implemented.
AB - In this paper a multi-function high precision tabletop CNC machine for making micro parts is developed. All the needed machining processes can be earned out on the same machine without unloading, reloading and readjusting the workpiece for subsequent processes. Currently the functions of micro high speed milling. micro-EDM, micro wire-EDM, and micro on-line measurement have been accomplished and tested. A dual-spindle is designed for micro CNC milling, microelectrode fabrication and micro-EDM. A novel mechanism that allows versatile cutting by a 20 μm diameter wire is designed for micro wire-EDM. Various micro parts and high aspect ratio microstructure are successfully fabricated. Furthermore, based on the "short-circuit principle" an on-line micro part measuring system is developed and implemented.
KW - High aspect ratio
KW - Micro high speed milling
KW - Micro measuring on-line
KW - Micro wire-edm
KW - Micro-edm
KW - Tabletop cnc machine
UR - http://www.scopus.com/inward/record.url?scp=70350691110&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70350691110&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:70350691110
SP - 485
EP - 490
BT - LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century
ER -