Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds

Shun Tong Chen, Sheng min Lin

Research output: Contribution to journalArticle

1 Citation (Scopus)


This paper presents a novel approach to narrow, deep slot-wall measurement in micromolds. A tabletop hybrid measurement-center combining micro spark erosion and automatic optical inspection technique (AOI) with Capacitive Sensing (CS) technology is developed for measuring the perpendicularity of slot-walls in the very narrow and deep slots of precision molds. A microprobe is machined in-situ using micro wire spark erosion while the AOI system acquires images to help fast position the completed microprobe precisely over the narrow slot to be measured. Capacitive sensing with a high-frequency, low-voltage electric signal is employed between the probe and slot-wall to precisely sense the perpendicularity of the wall. A four-step probe feed approach is utilized to improve measurement accuracy. The technical feasibility of capacitive sensing technology is experimentally confirmed.

Original languageEnglish
Pages (from-to)216-222
Number of pages7
JournalMicroelectronics Reliability
Publication statusPublished - 2018 Apr



  • Automatic optical inspection-assisted technique
  • Capacitive sensing technology
  • Hybrid measurement-center
  • Narrow deep slot-wall

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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