Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds

Shun-Tong Chen, Sheng min Lin

Research output: Contribution to journalArticle

Abstract

This paper presents a novel approach to narrow, deep slot-wall measurement in micromolds. A tabletop hybrid measurement-center combining micro spark erosion and automatic optical inspection technique (AOI) with Capacitive Sensing (CS) technology is developed for measuring the perpendicularity of slot-walls in the very narrow and deep slots of precision molds. A microprobe is machined in-situ using micro wire spark erosion while the AOI system acquires images to help fast position the completed microprobe precisely over the narrow slot to be measured. Capacitive sensing with a high-frequency, low-voltage electric signal is employed between the probe and slot-wall to precisely sense the perpendicularity of the wall. A four-step probe feed approach is utilized to improve measurement accuracy. The technical feasibility of capacitive sensing technology is experimentally confirmed.

Original languageEnglish
Pages (from-to)216-222
Number of pages7
JournalMicroelectronics Reliability
Volume83
DOIs
Publication statusPublished - 2018 Apr 1

Fingerprint

slots
Electric sparks
Erosion
Inspection
sparks
Molds
erosion
inspection
Wire
probes
low voltage
Electric potential
wire

Keywords

  • Automatic optical inspection-assisted technique
  • Capacitive sensing technology
  • Hybrid measurement-center
  • Narrow deep slot-wall

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

@article{43cd8052a2e24bb8b2ba18727f27fd64,
title = "Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds",
abstract = "This paper presents a novel approach to narrow, deep slot-wall measurement in micromolds. A tabletop hybrid measurement-center combining micro spark erosion and automatic optical inspection technique (AOI) with Capacitive Sensing (CS) technology is developed for measuring the perpendicularity of slot-walls in the very narrow and deep slots of precision molds. A microprobe is machined in-situ using micro wire spark erosion while the AOI system acquires images to help fast position the completed microprobe precisely over the narrow slot to be measured. Capacitive sensing with a high-frequency, low-voltage electric signal is employed between the probe and slot-wall to precisely sense the perpendicularity of the wall. A four-step probe feed approach is utilized to improve measurement accuracy. The technical feasibility of capacitive sensing technology is experimentally confirmed.",
keywords = "Automatic optical inspection-assisted technique, Capacitive sensing technology, Hybrid measurement-center, Narrow deep slot-wall",
author = "Shun-Tong Chen and Lin, {Sheng min}",
year = "2018",
month = "4",
day = "1",
doi = "10.1016/j.microrel.2017.03.029",
language = "English",
volume = "83",
pages = "216--222",
journal = "Microelectronics and Reliability",
issn = "0026-2714",
publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds

AU - Chen, Shun-Tong

AU - Lin, Sheng min

PY - 2018/4/1

Y1 - 2018/4/1

N2 - This paper presents a novel approach to narrow, deep slot-wall measurement in micromolds. A tabletop hybrid measurement-center combining micro spark erosion and automatic optical inspection technique (AOI) with Capacitive Sensing (CS) technology is developed for measuring the perpendicularity of slot-walls in the very narrow and deep slots of precision molds. A microprobe is machined in-situ using micro wire spark erosion while the AOI system acquires images to help fast position the completed microprobe precisely over the narrow slot to be measured. Capacitive sensing with a high-frequency, low-voltage electric signal is employed between the probe and slot-wall to precisely sense the perpendicularity of the wall. A four-step probe feed approach is utilized to improve measurement accuracy. The technical feasibility of capacitive sensing technology is experimentally confirmed.

AB - This paper presents a novel approach to narrow, deep slot-wall measurement in micromolds. A tabletop hybrid measurement-center combining micro spark erosion and automatic optical inspection technique (AOI) with Capacitive Sensing (CS) technology is developed for measuring the perpendicularity of slot-walls in the very narrow and deep slots of precision molds. A microprobe is machined in-situ using micro wire spark erosion while the AOI system acquires images to help fast position the completed microprobe precisely over the narrow slot to be measured. Capacitive sensing with a high-frequency, low-voltage electric signal is employed between the probe and slot-wall to precisely sense the perpendicularity of the wall. A four-step probe feed approach is utilized to improve measurement accuracy. The technical feasibility of capacitive sensing technology is experimentally confirmed.

KW - Automatic optical inspection-assisted technique

KW - Capacitive sensing technology

KW - Hybrid measurement-center

KW - Narrow deep slot-wall

UR - http://www.scopus.com/inward/record.url?scp=85016614423&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85016614423&partnerID=8YFLogxK

U2 - 10.1016/j.microrel.2017.03.029

DO - 10.1016/j.microrel.2017.03.029

M3 - Article

AN - SCOPUS:85016614423

VL - 83

SP - 216

EP - 222

JO - Microelectronics and Reliability

JF - Microelectronics and Reliability

SN - 0026-2714

ER -