Abstract
This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.
| Original language | English |
|---|---|
| Pages (from-to) | 170-172 |
| Number of pages | 3 |
| Journal | Optical Review |
| Volume | 16 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2009 Mar |
Keywords
- Algorithm
- Displacement
- Hariharan algorithm
- Phase shifting interferometry
- Piezoelectric transducer
- Twyman-Green interferometer
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
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