Determination of displacement with a piezoelectric transducer using phase-shift algorithms

Cheng Chung Jaing*, Yi Lin Shie, Chien Jen Tang, Yeuh Yeong Liou, Chun Ming Chang, Chii Rong Yang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.

Original languageEnglish
Pages (from-to)170-172
Number of pages3
JournalOptical Review
Issue number2
Publication statusPublished - 2009 Mar


  • Algorithm
  • Displacement
  • Hariharan algorithm
  • Phase shifting interferometry
  • Piezoelectric transducer
  • Twyman-Green interferometer

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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