This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.
- Hariharan algorithm
- Phase shifting interferometry
- Piezoelectric transducer
- Twyman-Green interferometer
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics